Y2O3 SINTERED BODY, CORROSION RESISTANT MEMBER AND METHOD FOR PRODUCING SAME, AND MEMBER FOR SEMICONDUCTOR/LIQUID CRYSTAL PRODUCING APPARATUS

摘要

Disclosed is a corrosion resistant member which is composed of a Y2O3 sintered body containing not less than 99.9 mass% of Y in terms of Y2O3. In the Y2O3 sintered body, the difference between the average crystal particle diameter of the surface portion and that of the deep portion is not more than 30 mum.