| 摘要 |
FIELD: measuring equipment engineering. ^ SUBSTANCE: micro-mirror contains mirror plate, made with possible connection to controlling electrode, separating bearing frame for separating mirror plate from electrodes, support, connected to separating bearing frame and mirror plate, allowing mirror plate to turn relatively to separating bearing frame around the axis, set by support, while mirror plate, separating bearing frame and support are made of single continuous block of material. ^ EFFECT: increased reflective efficiency, long-term reliability and simplified manufacturing process. ^ 3 cl, 14 dwg |
