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发明名称
METHOD TO PROTECT INTERNAL COMPONENTS OF SEMICONDUCTOR PROCESSING EQUIPMENT USING LAYERED SUPERLATTICE MATERIALS
摘要
申请公布号
KR20060053206(A)
申请公布日期
2006.05.19
申请号
KR20050076694
申请日期
2005.08.22
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
JI BING;MOTIKA STEPHEN ANDREW;WU DINGJUN;KARWACKI EUGENE JOSEPH JR.;ROBERTS DAVID ALLEN
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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