发明名称 |
LIGHT IRRADIATION APPARATUS, CRYSTALLIZATION APPARATUS, CRYSTALLIZATION METHOD AND DEVICE |
摘要 |
<p>A light irradiation apparatus includes a light modulation element which has a phase step having a phase difference substantially different from 180°, an illumination optical system which illuminates the light modulation element, and an image formation optical system which forms, on an irradiation surface, a light intensity distribution based on a light beam phase-modulated by the light modulation element. The illumination optical system illuminates the light modulation element with an illumination light beam inclined in a direction normal to a step line of the phase step.</p> |
申请公布号 |
KR20060050246(A) |
申请公布日期 |
2006.05.19 |
申请号 |
KR20050071653 |
申请日期 |
2005.08.05 |
申请人 |
ADVANCED LCD TECHNOLOGIES DEVELOPMENT CENTER CO.,LTD. |
发明人 |
TANIGUCHI YUKIO;MATSUMURA MASAKIYO |
分类号 |
H01L21/324;H01L21/02 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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