SLIDING ANODE FOR A MAGNETRON SPUTTERING SOURCE

摘要

A magnetron sputtering source includes a plurality of electrodes (12) and a switching circuit (14). The switching circuit (14) sequentially connects each of the plurality of electrodes (12) to a ground reference, making it anodic, while connecting the remaining of the plurality of electrodes as cathodes. A method of operating the magnetron sputtering source includes steps of: providing a plurality of target arrangements; causing each of the plurality of target arrangements to act as a cathode; and sequentially causing each of the plurality of cathodes to temporarily act as an anode.