发明名称 |
HIGH-FREQUENCY HEATING DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, AND LIGHT SOURCE DEVICE |
摘要 |
A high-frequency heating device including: a solid-state oscillator that generates a microwave; an amplifier that amplifies the microwave generated by the solid-state oscillator; an isolator that is connected to a stage subsequent to the amplifier, and blocks a reflected wave directed from an object exposed with the microwave; an antenna that irradiates the microwave toward the object; and a metal cavity that traps therein the microwave irradiated to the object. |
申请公布号 |
KR20060051930(A) |
申请公布日期 |
2006.05.19 |
申请号 |
KR20050092067 |
申请日期 |
2005.09.30 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
TAKADA YUTAKA;FUJII SATOSHI |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|