发明名称 |
ULTRASONIC TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
The present invention relates to an ultrasonic transducer that has a diaphragm in which an electrode layer is formed thereon. A fixed electrode having a plurality of asperities on the surface facing the diaphragm is provided. An alternating current signal is applied between the electrode layer formed on the diaphragm and the fixed electrode to generate ultrasonic waves. A groove is formed on the upper surface of the projections of the asperities of the fixed electrode to prevent the diaphragm from sticking to the fixed electrode. |
申请公布号 |
KR20060049485(A) |
申请公布日期 |
2006.05.19 |
申请号 |
KR20050047027 |
申请日期 |
2005.06.02 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
MATSUZAWA KINYA;TEZUKA MUTSUTO |
分类号 |
A61B8/00;B06B1/02;H01L41/08;H04R19/00;H04R31/00 |
主分类号 |
A61B8/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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