发明名称 DICING SHEET, MANUFACTURING METHOD THEREOF, AND MANUFACTURING METHOD OF SEMICONDUCTOR APPARATUS
摘要 A dicing sheet which supports electronic-component aggregation with adhesive in the case of separating the electronic-component aggregation in which a plurality of electronic components are integrated, has a substrate and an adhesion layer which is formed at one surface side of the substrate, in which a concave portion is formed on a surface of the adhesion layer, and the concave portion is formed so that a convex shape member projected from an adhesion surface of the electronic-component aggregation which is adhered to the dicing sheet is inserted.
申请公布号 KR20060049954(A) 申请公布日期 2006.05.19
申请号 KR20050061485 申请日期 2005.07.08
申请人 SEIKO EPSON CORPORATION 发明人 HARA KAZUMI
分类号 H01L21/78 主分类号 H01L21/78
代理机构 代理人
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