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发明名称
VACUUM PROCESS APPARATUS
摘要
申请公布号
KR20060050432(A)
申请公布日期
2006.05.19
申请号
KR20050074172
申请日期
2005.08.12
申请人
SHIMADZU CORPORATION
发明人
TATSUHIRO TAGUCHI
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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