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发明名称
APPARATUS FOR TREATING SUBSTRATES
摘要
申请公布号
KR20060051450(A)
申请公布日期
2006.05.19
申请号
KR20050087548
申请日期
2005.09.21
申请人
SHIBAURA MECHATRONICS CORP.
发明人
SUEYOSHI HIDEKI;ISO AKINORI
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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