发明名称 |
APPARATUS AND METHOD FOR UTILIZING A MENISCUS IN SUBSTRATE PROCESSING |
摘要 |
An apparatus for processing a substrate is provided which includes a proximity head proximate to a surface of the substrate when in operation. The apparatus also includes an opening on a surface of the proximity head to a cavity defined in the proximity head where the cavity delivers an active agent to the surface of the substrate through the opening. The apparatus further includes a plurality of conduits on the surface of the proximity head that generates a fluid meniscus on the surface of the substrate surrounding the opening.
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申请公布号 |
KR20060049725(A) |
申请公布日期 |
2006.05.19 |
申请号 |
KR20050058856 |
申请日期 |
2005.06.30 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
O'DONNELL ROBERT J. |
分类号 |
H01L21/304;B08B3/00;B08B5/00;B08B5/04;H01L21/00 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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