发明名称 |
PHOTOSENSITIVE COMPOSITION, COMPOUND FOR USE IN THE PHOTOSENSITIVE COMPOSITION, AND PATTERN-FORMING METHOD USING THE PHOTOSENSITIVE COMPOSITION |
摘要 |
<p>A photosensitive composition containing a compound generating an organic acid having a specific structure, a compound for use in the photosensitive composition, and a pattern-forming method using the photosensitive composition.</p> |
申请公布号 |
KR20060051302(A) |
申请公布日期 |
2006.05.19 |
申请号 |
KR20050085857 |
申请日期 |
2005.09.14 |
申请人 |
FUJI PHOTO FILM CO., LTD. |
发明人 |
WADA KENJI |
分类号 |
G03F7/004;G03F7/00 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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