发明名称 PHOTOSENSITIVE COMPOSITION, COMPOUND FOR USE IN THE PHOTOSENSITIVE COMPOSITION, AND PATTERN-FORMING METHOD USING THE PHOTOSENSITIVE COMPOSITION
摘要 <p>A photosensitive composition containing a compound generating an organic acid having a specific structure, a compound for use in the photosensitive composition, and a pattern-forming method using the photosensitive composition.</p>
申请公布号 KR20060051302(A) 申请公布日期 2006.05.19
申请号 KR20050085857 申请日期 2005.09.14
申请人 FUJI PHOTO FILM CO., LTD. 发明人 WADA KENJI
分类号 G03F7/004;G03F7/00 主分类号 G03F7/004
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