发明名称 Semiconductor device
摘要 A semiconductor device which comprises a wiring structure capable of reducing stress concentration at a boundary between a wiring and a low dielectric constant insulator even when the low dielectric constant insulator is used as an interlevel or interwiring insulator in a multilevel wiring, suppressing peeling-off of the insulator and having increased heat radiation efficiency is provided by comprising an insulator formed on a semiconductor substrate, a wiring formed in the insulator, and a network dummy formed in the insulator and disposed to be apart from the wiring.
申请公布号 US2006103017(A1) 申请公布日期 2006.05.18
申请号 US20050033994 申请日期 2005.01.13
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 USUI TAKAMASA;SHIBATA HIDEKI;MUROFUSHI TADASHI;JIMBO MASAKAZU;HIRAYAMA HIROSHI
分类号 H01L23/34 主分类号 H01L23/34
代理机构 代理人
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