| 摘要 |
In a microreactor, a groove is formed by a first substrate ( 11 ) and an intermediate substrate ( 12 ) layered on the first substrate ( 11 ), and an opening of the groove is closed by a second substrate ( 13 ) serving as a lid member to form a micro channel in which fluids flow. The intermediate substrate ( 12 ) comprises a channel area ( 120 ) including a through hole forming part of the micro channel and a plate-like connecting portion ( 122 ) which is thinner than parts on both sides of the channel area ( 120 ), for connecting the parts on both sides in a predetermined position of the micro channel in a longitudinal direction. In the microreactor, it is possible to easily handle the intermediate substrate ( 12 ) as one member in forming and handling the intermediate substrate ( 12 ) and simplify a process of manufacturing the microreactor.
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