| 摘要 |
The present invention is a method of introducing a gas into a processing unit, the processing unit including a processing container and a showerhead part, the processing container having a processing space for conducting a predetermined process to an object to be processed, the showerhead part having a plurality of separated diffusion rooms into each of which a source gas or a reduction gas is supplied, each of the diffusion rooms diffusing and supplying the supplied gas into the processing space. The method includes: a selecting step of selecting a combination wherein a pressure difference between a pressure of a diffusion room into which the reduction gas is supplied and a pressure of a diffusion room into which the source gas is supplied is larger, from combinations of the source gas, the reduction gas and the plurality of diffusion rooms, and a supplying step of supplying the respective gases into the respective diffusion rooms based on the combination selected at the selecting step.
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