发明名称 Non-volatile device manufactured using ion-implantation and method of manufacture the same
摘要 Embodiments of the invention include a non-volatile memory device manufactured using ion-implantation, and a method of manufacturing the same. A dielectric layer may be formed on a semiconductor substrate, and an ion implantation layer, which may be used as a charge trapping site, may be formed by ion implantation with Si or Ge. Then, an annealing process may be performed. Subsequently, a process for forming a transistor on the dielectric layer may be performed.
申请公布号 US2006105524(A1) 申请公布日期 2006.05.18
申请号 US20050190827 申请日期 2005.07.28
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HAN JEONG-HEE;CHO HOON-YOUNG;KIM CHUNG-WOO;PARK CHAN-JIN;OH JONG-SOO;CHO KI-HYUN
分类号 H01L21/336 主分类号 H01L21/336
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