发明名称 DRAWING APPARATUS AND DRAWING METHOD
摘要 <p>In an image drawing apparatus and an image drawing method for forming a desired two-dimensional pattern on an image drawing surface by using a plurality of image drawing heads, uneven density and resolution caused by errors in relative positions of the heads and installation angles thereof and by an effect of pattern distortion can be reduced. A rectangular two-dimensional pixel array is installed in each of exposure heads in an exposure apparatus (image drawing apparatus) so as to make a predetermined angle with the direction of scanning, facing an exposure surface of a photosensitive material. Combinations of slits and photo detectors detect positions of light spots in the exposure surface comprising inter-head relay areas. Pixels in the pixel arrays are selected so as to realize N-overlay exposure ideally by causing overexposure and underexposure to be minimal in the inter-head relay areas.</p>
申请公布号 KR20060049398(A) 申请公布日期 2006.05.18
申请号 KR20050052305 申请日期 2005.06.17
申请人 FUJI PHOTO FILM CO., LTD. 发明人 SUMI KATSUTO;UEMURA TAKAYUKI
分类号 H01L21/027;G03B27/54;G03F1/08 主分类号 H01L21/027
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