| 摘要 |
<p>An illumination optical system (100) for illuminating a target surface (200) using light from a light source includes a modified illumination generator (130) for generating a modified illumination with a predetermined polarization state for the target surface, wherein the modified illumination generator includes a lambda / 4 phase plate unit (131) that includes a lambda / 4 phase plate for converting a circularly polarized light into a linearly polarized light in a predetermined direction, and a diffractive optical element unit (132) that is arranged in a substantially conjugate relationship with the target surface, and includes a diffractive optical element used for the lambda / 4 phase plate to generate a predetermined illumination intensity distribution when the diffractive optical element unit receives the linearly polarized light. <IMAGE></p> |
