Aerodynamic focusing of nanoparticle or cluster beams

摘要

Guidelines for designing lenses or systems for aerodynamic focusing of nanoparticle or cluster beams. The design process may involve obtaining a relationship between particle size, operating pressure and aperture size, and selecting the operating pressure to provide continuum flow of an aerosol beam through the aerodynamic lens. Particles having diameters less than 30 nanometer may be focused. Simulation techniques for evaluating designed lenses are also disclosed.