发明名称 METHOD AND APPARATUS FOR CONTROLLING THE VAPORIZATION OF ORGANIC MATERIAL
摘要 <p>A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; and providing a volume of organic material and maintaining the temperature of such organic material in a first condition so that its vapor pressure is below that needed to effectively form a layer on the substrate, and in a second condition heating a volume percentage of the initial volume of such organic material so that the vapor pressure of the heated organic material is sufficient to effectively form a layer.</p>
申请公布号 WO2006053017(A1) 申请公布日期 2006.05.18
申请号 WO2005US40539 申请日期 2005.11.09
申请人 EASTMAN KODAK COMPANY;BOROSON, MICHAEL LOUIS;LONG, MICHAEL;GRACE, JEREMY MATTHEW;ZHANG, JINMEI;KOPPE, BRUCE EDWARD;PALONE, THOMAS WILLIAM;REDDEN, NEIL PETER 发明人 BOROSON, MICHAEL LOUIS;LONG, MICHAEL;GRACE, JEREMY MATTHEW;ZHANG, JINMEI;KOPPE, BRUCE EDWARD;PALONE, THOMAS WILLIAM;REDDEN, NEIL PETER
分类号 H01L51/56;C23C14/12;C23C14/24;H01L51/40;H05B33/10 主分类号 H01L51/56
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