| 摘要 |
PROBLEM TO BE SOLVED: To solve problems of conventional ultrasonic cleaning devices, that since cleaning is done by ultrasonic waves and a washing solution or fluid jet, fine attached matter or contaminants cannot be removed quickly. SOLUTION: In this cleaning device, a horn 10 is suitably tiltedly mounted to a cleaning object substrate 9, a spherical vibrator 11 formed with a flexible material is mounted at a tip of the horn 10, a piezoelectric vibrator 12 is mounted on a rear surface facing the tip of the horn 10, a high frequency oscillator 13 and a low frequency oscillator 14 are connected to the piezoelectric vibrator 12, a water injection nozzle 15 is mounted at the side part of the horn 10, to jet the washing solution from the injection nozzle 15 to flow along the spherical vibrator 11. COPYRIGHT: (C)2006,JPO&NCIPI
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