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经营范围
发明名称
LITHOGRAPHIC APPARATUS
摘要
申请公布号
KR20060049357(A)
申请公布日期
2006.05.18
申请号
KR20050100968
申请日期
2005.10.25
申请人
ASML NETHERLANDS B.V.
发明人
LALLEMANT NICOLAS ALBAN;BECKERS MARCEL;HERTOG WLADIMIR FRANSISCUS GERARDUS MARIA;VAN DER PLAS DAVID THEODORUS WILLY;KOELINK STEPHAN;JANSEN ROB
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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