| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film pattern forming substrate capable of forming a fine thin film pattern shaped in fine line accurately and stably, a manufacturing method of device and an electro-optical device, and an electronic apparatus. SOLUTION: In a substrate P, the thin film pattern is formed on the front surface. The substrate P is prepared by a liquid injecting portion A2 capable of injecting a functional liquid L, and a liquid flowing portion A1 arranged in connection so that the functional liquid L can flow. In these line widths of the liquid injecting portion A2 and the liquid flowing portion A1, they are formed in such a manner that the width d of the liquid injecting portion A2 is equal to or less than 2 times of the line width b of the liquid flowing portion A1. COPYRIGHT: (C)2006,JPO&NCIPI |
