| 摘要 |
PROBLEM TO BE SOLVED: To provide a layered body manufacturing method which manufactures a plurality of layers at one time wherein by collectively diffusion bonding metal plates of a plurality of metal plate sets without generating diffusion bonding between two metal plates belonging to different metal plate sets, and also to provide a manufacturing method of an inkjet head thereof. SOLUTION: The method of manufacturing an inkjet head includes steps of: forming an insulating ceramic layer 31 on one surface of a vibration plate 30; stacking, via the insulating ceramic layer 31, plate sets 50 having a plurality of metal plates 10 to 12 which forms a channel unit, and the vibration plate 30 whose other surface is overlapped is stacked on a cavity plate 10 included in the plurality of metal plates 10 to 12 and forming a pressure chamber 14; heating the plurality of stacked plate sets 50 so that the plurality of metal plates 10 to 12 belonging to the plurality of plate sets 50 and the vibration plate 30 are simultaneously bonded by diffusion bonding, excluding a part between the cavity plate 10 stacked via the insulating ceramic layer 31 and the vibration plate 30. COPYRIGHT: (C)2006,JPO&NCIPI
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