| 摘要 |
PROBLEM TO BE SOLVED: To provide a method, a system, etc. having high defect detection capability wherein the light quantity of a light source is controlled, and effects causing noises are previously removed especially in defect detection inspection. SOLUTION: A panel 3 for light quantity control is provided on an optical path of light emitted from the light source 1A for inspection and comprises a plurality of elements for correcting the light at respectively disposed positions based on a control signal from a panel controller 8. The panel 3 is caused to display an image plane wherein the transmission factor of a selected element is set to be an arbitrary not-minimum transmission factor while the transmission factors of the other elements are minimized. Based on picture image data taken by a camera 6, a picture image processing means 7A detects the highest luminance value in the image plane, compares the luminance value with a reference value or a reference range, determines whether a decided luminance value is the reference value or within the reference range, and decides the transmission factor of the selected element so that it is equal to or less than the reference value or within the reference range based on the determination. This is performed for each of the elements. COPYRIGHT: (C)2006,JPO&NCIPI
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