| 摘要 |
PROBLEM TO BE SOLVED: To prevent air bubbles from mixing into a liquid fed to a nozzle, and to prevent the liquid from freezing. SOLUTION: When the air bubbles are detected in the liquid, or a cold district switch 56 is turned on, or it is detected by a temperature sensor 44 that the liquid temperature is decreased to a temperature where the liquid freezes, a controlling apparatus 48 switches a space between a circulation pipeline 22 and a delivering opening of a pump 28 to a communicating condition, and the liquid compressively forwarded by a pump 28 is returned to a storing tank 14. In addition, when no air bubble is detected in the liquid, or the cold district switch 56 is turned on to return a specified amount of the liquid, or it is detected by the temperature sensor 44 that the liquid temperature is elevated to a temperature where the liquid does not freeze, the controlling apparatus 48 closes an electromagnetic valve 40 of the circulation pipeline 22. COPYRIGHT: (C)2006,JPO&NCIPI
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