| 摘要 |
In apparatus of the invention, a transport pod ( 1 ) can be coupled to an article-passing opening ( 11 ) of process equipment ( 9 ) in leaktight manner with sealing being provided by an interposed interface peripheral gasket ( 16 ). The pod door ( 4 ) can be secured selectively to the interface door ( 12 ) so that they can be moved together as a unit along an axial stroke followed by a transverse stroke under drive from door actuator means ( 14 ). The transport pod ( 1 ) is held by retaining means ( 15 ). The peripheral volume ( 21 ) around the two doors can be pumped out by means of a pump ( 22 ) and a duct ( 23 ). The pod door ( 4 ) can be locked on the transport door ( 1 ) by locking means ( 20 ) that guarantee good sealing while the transport pod ( 1 ) is separate from the process equipment ( 9 ). This ensures good sealing of the transport pod ( 1 ), and enables the doors ( 4, 12 ) to be opened under a vacuum without polluting the inside atmosphere.
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