发明名称 |
Optical method of examining reliefs on a structure |
摘要 |
A method for studying a surface provided with relief features, wherein a measurement spectrum is taken and then compared with test spectra representative of arbitrary structures that are adjusted stepwise. A correlation over representative points of the spectra is selected while optimizing the determination by a hierarchized adjustment of the parameters.
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申请公布号 |
US2006103855(A1) |
申请公布日期 |
2006.05.18 |
申请号 |
US20050534534 |
申请日期 |
2005.05.12 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
HAZART JEROME |
分类号 |
G01B11/14;G01B11/06;G01B11/24 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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