发明名称 Method and apparatus for selectively filtering residue from a processing chamber
摘要 The processing system comprises a pump assembly, a bypass assembly, and a processing chamber, which together form a circulation path. The bypass assembly is configured so that in a first mode, a filter does not form part of the circulation path, and in a second mode the filter does form part of the circulation path. Thus, the processing system is placed in the first mode when a processing material circulated over the circulation path does not need to be filtered. The processing system is placed in the second mode when a processing material circulated over the circulation path must be filtered.
申请公布号 US2006102282(A1) 申请公布日期 2006.05.18
申请号 US20040990162 申请日期 2004.11.15
申请人 SUPERCRITICAL SYSTEMS, INC. 发明人 SCOTT DOUGLAS M.
分类号 C23F1/00 主分类号 C23F1/00
代理机构 代理人
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