| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting apparatus which can improve workability at the time of maintaining a prober. SOLUTION: In the inspecting apparatus which includes the prober 20 for conveying an imaging element 5 and positioning the imaging element 5 in a predetermined position, a head plate 21 for opening and closing the open-top 22 of the prober 20, an illuminating unit 10 for irradiating a light through an optical adapter 11, etc. at the imaging element 5 in the inside of the prober 20, and an F value adapter transformation mechanism 12 for holding the optical adapter 11, etc. selectively on an optical axis; the F value adapter transformation mechanism 12 is held in an F value adapter transformation mechanism holder 15 installed in the head plate 21. COPYRIGHT: (C)2006,JPO&NCIPI
|
