| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric oscillator providing a small-sized piezoelectric oscillator with simple handling and excellent productivity. SOLUTION: The manufacturing method of the piezoelectric oscillator includes steps of: preparing a mother substrate comprising a plurality of oscillator substrate regions and marginal substrate regions and forming monitor electrode pads for measuring piezoelectric vibration elements to the oscillator substrate regions and the marginal substrate regions respectively; mounting the piezoelectric vibration elements on a front principal side of the oscillator substrate regions, measuring the frequency characteristics of the piezoelectric vibration elements, finely adjusting the frequency of the piezoelectric vibration elements and thereafter cutting off wiring patterns from the monitor electrodes formed to the marginal substrate regions of the mother substrate; placing and joining covers sealing the piezoelectric vibration elements onto the oscillator substrate regions and mounting spacer members and oscillation integrated circuit elements on a rear principal substrate of the oscillator substrate regions; and obtaining a plurality of the piezoelectric oscillators by cutting off the oscillator substrate regions along their outer circumferences. COPYRIGHT: (C)2006,JPO&NCIPI
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