| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope and a sample observation method capable of obtaining a stable scanning image by sufficiently reducing the influence of charge-up of a sample surface. SOLUTION: The scanning electron microscope 1 is provided with electron guns 3A, 3B, and electron beam B<SB>1</SB>emitted from the electron gun 3A has a higher energy than the electron beam B<SB>2</SB>emitted from the electron gun 3B. The electron beams B1, B2 emitted from the electron guns 3A, 3B are bent by a beam bending mechanism 8 so that their irradiation direction toward a substrate 2 coincide with each other, further, made to pass through an alignment coil 9 and an objective lens 10, scanned by a scanning coil 11, and irradiated on the same position of the substrate 2. At this time, secondary electron emitted from the substrate 2 is detected by a detector 15, a detection signal of which 15 is sent to an image processing part 16, and a scanning image of the substrate 2 is produced by the image processing part 16. COPYRIGHT: (C)2006,JPO&NCIPI
|
