| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface processing machine for easily providing a complicated groove and a shape, and also a fine groove and a shape such as a light conductive plate. SOLUTION: An X axis table 4 and a gate-shaped column 8 are arranged on a base 2. A Y axis table 9 is arranged on a gate-shaped column. The Y axis table is provided with a tool 15 via a vary small high speed tool positioning device 20 capable of controlling very small high speed displacement in the vertical direction to a tool feeder 10 in the Z axis direction. While fixing a Z axis position of the tool feeder, very small processing in the vertical direction is performed by the very small high speed tool positioning device and the tool by moving the X axis and/or the Y axis. A moving distance in the vertical direction of a high speed positioning device is set to 20μm. The X axis and Y axis tables are held by a static pressure bearing, and are driven by a linear motor 7. The tool feeder is held by a static pressure screw 18, and can be moved and positioned in the vertical direction by being driven by a servomotor 17. COPYRIGHT: (C)2006,JPO&NCIPI
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