发明名称 |
Position detecting method and apparatus |
摘要 |
A position detecting method includes the steps of forming an image of a mark on a sensor, performing a first process that processes a raw signal obtained from the sensor with plural parameters, performing a second process that determines an edge of a signal processed by the first process for each parameter, determining a parameter from a result of the second process obtained for each parameter, and calculating a position of the mark based on a determined parameter.
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申请公布号 |
US2006106566(A1) |
申请公布日期 |
2006.05.18 |
申请号 |
US20050320944 |
申请日期 |
2005.12.28 |
申请人 |
OISHI SATORU;SUZUKI TAKEHIKO |
发明人 |
OISHI SATORU;SUZUKI TAKEHIKO |
分类号 |
G06F15/00;G03F7/20;G03F9/00;H01L21/027 |
主分类号 |
G06F15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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