| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing method which is proper for manufacturing X-ray lenses with small X-ray absorption, and capable of shortening focal distance. SOLUTION: (a) The first region of a mask 70 whose first region 72 and the second region 73 practically transmitting radiated light are partitioned is shielded and the radiated light 2 having transmitted the second region is introduced in a base material 40 to process it. (b) The relative position relation between the base material and the progress direction of the radiated light is changed without changing the relative position between the mask 70 and the base material 40. (c) The second region 73 is shielded and the radiated light having transmitted the first region 72 is introduced in the base material 40 to process the base material 40. COPYRIGHT: (C)2006,JPO&NCIPI
|
