| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device for a circuit device that can form connecting electrodes having mutually full insulation with a small array pitch, and perform a predetermined electrical inspection about all the electrodes to be inspected with high accuracy, even with respect to a circuit device inspecting electrode apparatus having a low contact resistance and a manufacturing method thereof, and to provide the inspection device of the circuit device having a small array pitch for the electrodes to be inspected or a large number of electrodes. SOLUTION: The electrode apparatus comprises an insulating substrate, a plurality of connecting electrodes, arranged at predetermined positions on a surface side thereof, having a planarized back surface, and a plurality of electric wires with each end surface thereof is integrally coupled to the back surfaces of the connecting electrodes, in a state with each end thereof being fixed to penetrate the insulating substrate in the thickness direction thereof so as to extend. The inspection device comprises the circuit device inspecting electrode apparatus. COPYRIGHT: (C)2006,JPO&NCIPI
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