发明名称 METHOD FOR MANUFACTURING NANOSTRUCTURE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a nanostructure, by which pores having diameters on the order of nanometers (nm) and having diameter decreasing in a tapered shape can be manufactured. SOLUTION: The method includes alternately repeating cycles of an anodizing step of anodizing Al or an Al alloy 1 to form an anodic oxide film 2 having pores 3 and a pore-widening step for increasing diameter of the pore, so that the diameter of the pore is varied in the depth direction. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006124827(A) 申请公布日期 2006.05.18
申请号 JP20050233286 申请日期 2005.08.11
申请人 CANON INC 发明人 MATSUO YASUHIRO;ISHIBE YOSHIHIRO;KIMURA KAZUMI;NOMURA KENTARO
分类号 C25D11/12;B82B3/00;C25D11/04;C25D11/08;G02B26/10 主分类号 C25D11/12
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