| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a component for an apparatus to produce a group 3-5 compound having tolerance to high temperature ammonia gas and wearing resistance and in addition where the release of B<SB>2</SB>O<SB>3</SB>is little. <P>SOLUTION: The component for the apparatus to produce the group 3-5 compound where the content of an ethanol soluble boron oxide is 0.1 mass% or less (including 0%) and whose relative density is 80% or more consists of a composite sintered body involving boron nitride and silicon nitride. The component for the apparatus to produce the group 3-5 compound is produced by that mixed powders containing boron nitride whose mean particle diameter is 5-25 μm and where the content of the ethanol-soluble boron oxide is 1 mass% or less (including 0%) of 10 mass% or more and containing silicon nitride powders of 90 mass% or less and where the total amount of the both powders is 90 mass% or more (including 100%) are sintered under a non-oxidized atmosphere or in vacuum. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
