| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a cerium-based abrasive containing no fluorine, improved in not only abrasive activity but also grinding accuracy. <P>SOLUTION: The cerium-based abrasive contains≥30 wt.% cerium oxide based on the total rare earth oxide (TREO) and has≤0.5 wt.% fluorine content based on TREO, wherein the cerium-based abrasive contains 0.01-3.0 wt.% at lest one alkali metal selected from a group consisting of sodium, potassium and lithium based on TREO as a whole, and has≤0.3 wt.% chlorine content. The content of at least one alkali metal selected from a group consisting of sodium, potassium and lithium is preferably 0.02-1.0 wt.% (TREO base), and, in that case, the chlorine content is preferably≤0.1 wt.%. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
