| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas treatment apparatus, having a smaller and easier constituent and also capable of carrying out a stable operation by preventing or lowering a bad influence due to generation of water droplets. <P>SOLUTION: The gas treatment apparatus 10 has an electrical discharging part 12 equipped with an electrode for forming, by discharging, an active plasma to carry out a cleaning treatment of(for) a gas X to be treated, a discharging power source 13 for supplying (an) electric power to the electrical discharging part 12, and a heating means 15 for heating the electrical discharging part 12 so that a surface temperature of the electrical discharging part 12 contacting to the gas X to be treated is equal to or more than a temperature of the gas X to be treated in the electrical discharging part 12. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
