| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate joining device which is equipped with a shutter assembling system for forming a vacuum space for joining substrates. SOLUTION: The substrate joining device for joining a pair of substrates is characterized by including: a first pressurizing plate and a second pressurizing plate to support the respective substrates; a transfer portion arranged so as to transfer at least one out of the first and second pressurizing plates; the shutter assembling system having a plurality of shutters arranged so as to be in close contact with the first and second pressurizing plates in order to form a closed space together with the first and second pressurizing plates, and a shutter driving portion to drive the shutters so as to bring them into close contact with the first and second pressurizing plates; and an evacuating portion to evacuate a gas from the closed space formed with the first and second pressurizing plates and the shutter assembling system. Thereby the distance of separation between the substrates is suitably adjusted and vacuum evacuation efficiency in the vacuum operation is improved. COPYRIGHT: (C)2006,JPO&NCIPI
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