摘要 |
PROBLEM TO BE SOLVED: To provide a grating and a clean room, facilitating the work for fixing a manufacturing apparatus to the floor surface of a clean room. SOLUTION: This grating 10 constitutes the floor surface of the clean room, and has a screw hole 12 opened to the surface thereof. By this constitution, the manufacturing apparatus is placed on the surface of the grating laid on the floor surface of the clean room. Subsequently, one end of the fixing metal fitting is fitted to the manufacturing apparatus. The through hole at the other end of the fixing metal fitting and the screw hole of the grating are superposed in a plan view. Further, the screw is passed through the through hole at the other end of the fixing metal fitting and the screw hole of the grating from above the fixing metal fitting, and screw-fitted to thereby fix the manufacturing apparatus to the floor surface of the clean room. COPYRIGHT: (C)2006,JPO&NCIPI
|