| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum system capable of performing a plurality of treatments in which a difference in pressure is remarkably wide without reducing the controllability of the pressure. SOLUTION: In the vacuum system comprising: a vacuum chamber; a means of feeding gas to the vacuum chamber; and an exhausting means of exhausting the vacuum chamber, the exhausting means comprises: a first exhausting means 124 for performing a treatment under the first pressure; and a second exhausting means 126 for performing a treatment under the second pressure, and the second exhausting means 126 is provided at the down stream than the first exhausting means 124 in such a manner that, at the time of performing the treatment under the second pressure, the first exhausting means 124 is stopped, and also, the vacuum chamber can be exhausted through the first exhausting means 124. COPYRIGHT: (C)2006,JPO&NCIPI
|
