发明名称 Verfahren zur Registrierung einer Kennung und Photomaskensatz
摘要 A method of recording different identifiers, each including at least one character, on multiple plate-type members, involves the use of a photomask of a first type and at least two photomasks of a second type. The photomask of the first type has an opaque pattern that defines a blank region to write the identifier thereon. Each of the photomasks of the second type has an opaque pattern defining the at least one character. The method further includes the steps of forming a photoresist layer on the surface of one of the plate-type members, exposing the photoresist layer, except the blank region, to a radiation through the photomask of the first type, and forming a latent image of the at least one character in the blank region through at least one of the photomasks of the second type. <IMAGE> <IMAGE> <IMAGE>
申请公布号 DE60210381(D1) 申请公布日期 2006.05.18
申请号 DE2002610381 申请日期 2002.08.06
申请人 NEOMAX CO., LTD. 发明人 HIROOKA, TAISUKE
分类号 G03F1/00;G03F7/20;G11B5/31;H01L23/544 主分类号 G03F1/00
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