发明名称 PBN VESSEL AND METHOD OF MANUFACTURING PBN VESSEL
摘要 There is disclosed a PBN container in which a conductive film is deposited on a surface of a body formed by depositing PBN (pyrolytic boron nitride), wherein, at least, an angle between a PBN cut face of the body and at least one wall surface adjacent to the PBN cut face is 20°-80°, and a method for producing a PBN (pyrolytic boron nitride) container comprising at least steps of depositing PBN to form a body, processing a PBN cut face of the formed body so that at least, an angle between the PBN cut face and at least one wall surface adjacent to the PBN cut face is 20°-80°, and coating a surface of the processed body with a conductive film. Thus, there can be provided a PBN container excellent in durability where a conductive film is laminated on a surface of a body formed by depositing PBN, and a method for producing the PBN container.
申请公布号 KR20060048293(A) 申请公布日期 2006.05.18
申请号 KR20050049149 申请日期 2005.06.09
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 KIMURA NOBORU;KUSHIHASHI TAKUMA
分类号 C23C14/00 主分类号 C23C14/00
代理机构 代理人
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