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发明名称
Verfahren zur Herstellung von synthetischem Quarzglas
摘要
申请公布号
DE69834083(D1)
申请公布日期
2006.05.18
申请号
DE19986034083
申请日期
1998.10.08
申请人
NIKON CORP.
发明人
FUJIWARA, SEISHI;KOMINE, NORIO;JINBO, HIROKI
分类号
C03B19/14;C23C16/24;C03B8/04;C03B20/00;C23C16/44;C23C16/448
主分类号
C03B19/14
代理机构
代理人
主权项
地址
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