PARTICLE DETECTION DEVICE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a detector system for resolving radiation from a ghost particle from radiation from an actual particle for differentiation between a particle and a ghost particle.

SOLUTION: The detector system outputs a plurality of detector signals corresponding to intensities of radiation being incident on a part of the detector system or the detector system outputs detector signals corresponding to intensities of radiation incident on the detector system. In the plurality of detector signals, radiation received from a particle does not have levels higher than a predetermined threshold level respectively and, when radiation is received from the ghost particle, an approximately same level above the threshold level is displayed. The detector system includes a radiation detector device for generating a first detector signal in response to radiation incident on a predetermined part and a radiation blocking assembly for preventing radiation not originating from a particle from being incident on the predetermined part of the detector device.

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