摘要 |
PROBLEM TO BE SOLVED: To realize an ion trap time-of-flight mass spectroscope of high sensitivity by appropriately controlling gas supply volume to an ion trap part and a multipolar part in accordance with purposes of analysis. SOLUTION: A CPU 1 reads a helium gas lead-in volume corresponding to an operation mode from a memory 16, controls a trap mass-flow controller 4 through a DA converter 3, and introduces He gas to the ion trap part 12. The CPU 1 monitors a He gas inflow of the ion trap part 12, and controls the mass flow controller 4 so that the ion trap part 12 be at an optimum pressure. The CPU 1 monitors a gas volume led into a multipolar part 14 in accordance with a small amount of He gas flowing into the multipolar part 14 from the ion trap part 12, and controls a mass flow controller 5 so as the multipolar part 14 to be at an optimum pressure. Gas flow volume is controlled based on a predicted value of a volume of He gas flowing into the multipolar part 14 from the ion trap part 12 in accordance with the operation mode. COPYRIGHT: (C)2006,JPO&NCIPI
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