| 摘要 |
PROBLEM TO BE SOLVED: To independently control displacement of a micromachine structure, without spatially overcrowding electric wiring with a simple structure. SOLUTION: This electrostatic microactuator has a semiconductor substrate 101, a mechanically movable cantilever 102 formed of a conductive material or a semiconductor material so as to be opposed on the semiconductor substrate 101 via an air layer on the semiconductor substrate 101, a photodiode 107 formed between an anchor part 103 and the semiconductor substrate 101 being a part of the cantilever 102 so as to be connected in parallel to capacitance 106 formed of the cantilever 102 and the semiconductor substrate 101, and a power source 105 for impressing voltage on the photodiode 107 so as to become inverse bias via a resistance 104 on the cantilever 102 side being a contact point of a parallel circuit of the capacitance 106 and the photodiode 107. COPYRIGHT: (C)2006,JPO&NCIPI
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