| 摘要 |
PROBLEM TO BE SOLVED: To easily and speedily acquire materials for objectively determining whether measurement results are correct or not and exclude incorrect stress measurements caused by setting errors of parameters as much as possible in a stress measuring apparatus for mapping and measuring stress in a prescribed area of a sample. SOLUTION: The stress measuring apparatus is provided with an energy ray irradiation part for irradiating energy rays toward the sample, an energy ray scanning part for scanning the surface of the sample with the energy rays, a photo-detection part for dispersing and detecting light generated at each point of the sample by scanning with the energy rays, a spectral data creation part for receiving output signals from the photo-detection part and creating spectral data indicating the spectrum of each light, a correlation value computation part for computing correlation values between prescribed reference data and each spectral data on the basis of a prescribed arithmetic expression, and a correlation value output part for outputting each correlation value as it is or after conversion into a prescribed form such as image data. COPYRIGHT: (C)2006,JPO&NCIPI
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